Applied Physics, Inc.

Website Links

Description

SURF-CAL PSL spheres simplify the job of preparing calibration wafers in your facility by providing pre-mixed PSL spheres in a 50ml bottle. Particle sizes correspond to the calibration point sizes required by instrument manufacturers. Particle concentrations are 1 x 10 e10 particles per mL. SEMI manufactures have demanded specific particle sizes to be used when calibrating Scanning Surface Inspection Systems, also referred to wafer inspection tools. Working with instrument manufacturers the SURF-CAL PSL spheres meet SEMI standard M52 (3) and M53 guidelines.

The SMS uses MSP designed Differential Mobility Analyzer (DMA) with 4D (4-Dimensional) Controls™ of airflow, high voltage, pressure compensation and temperature compensation to provide the most accurate sizing possible. Sheath flow for the DMA is recirculated to provide repeatable stable flow for improved DMA size response. Boltzmann equilibrium charge is established on the aerosol using a low level ionizing source. The CPC is of advanced MSP design that has solved the traditional problems of water condensation and collection in the saturator.

The second method, DMA (Differential Mobility Analysis) Deposition Control, applies more control over the PSL Spheres. The DMA system is calibrated to NIST Standards at 0.1007um, 0.269um and 0.895um. The bottle PSL spheres are then compared to this NIST Calibration, and only that correct portion of the PSL size distribution is deposited from the bottle. This ensures that even if various PSL manufactures have variations in PSL size, the DMA based deposition will deposit only that portion of the PSL size distribution that conforms to NIST calibration.

Products & services

Similar companies nearby