Dsm

Description

Semiconductor Process and Metrology A manufacturer of metrology/inspection tooling needed a compact, stiff stage for the precision positioning of semiconductor wafers in a light vacuum environment. DSM's ZSA-1000 was designed to provide +/- 500 microns of displacement in a stage height of one inch. Flexure-based, parallel arms provide a wide stance for motion stability that eliminates the need for additional guiding rails. The stage also features an optional 28 mm diameter through-hole for tooling or optical access.

Solution: Using patented Flexframe Piezo ActuatorTM technology, DSM designed a built a system that allowed for proportional modulation of flow in a smooth voltage controlled manner. The actuator was constructed from Invar 36 in order to minimize temperature sensitivity. Flexframe technology eliminates the need for bearings, bushings or lubrication which eliminates the possibility of binding as a result of thermal contraction/expansion mismatches.

Miniature Pipe Crawler When engineers at NASA's Marshall Space Flight Center wanted to explore various means for creating a device that could crawl through the coolant lines of the Space Shuttle's main engine (SSME), they called on Dynamic Structures and Materials (DSM). DSM offers custom design capabilities for precision motion control platforms required for unique positioning applications and environments. The miniature tube crawling device was developed in response to NASA's request for the development of miniature inspection technologies.

DSM's experience in designing analog, power, and control circuits for use in piezoelectric positioning systems has developed unique circuit design capabilities. DSM's customers frequently stipulate requirements that push the envelope on power, miniaturization, and features. These design capabilities are strengthened by significant test and measurement equipment suitable for development efforts in applications related to driving and controlling piezoelectric systems. DSM's circuit design capabilities are available as an extension of our customers' own engineering resources.

FULL LENGTH RUN! DSM welcomes inquiries into this developing technology and is actively seeking commercial opportunities for this system and/or expansion into additional military platforms. PROJECT DESCRIPTION: A Phase II SBIR from the NAVY to design and build a Vertical Linear Accelerator for Human Visual-Vestibular Acuity Testing and Training. Main Goal: To provide vertical linear oscillation stimuli to the otolith organs, which are apparently less well understood than the semicircular canals.

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