Fulcrum Technologies

Description

Contact us for pricing by phone or email us with any questions. Fulcrum Technologies, Incorporated designs and manufactures machine bases for vibration sensitive production tools used in the semiconductor fabrication process. Most of our products are installed to support Photolithography or Metrology equipment, but we also manufacture bases for structural support of tools too heavy to be placed on a typical access floor. For process tools requiring compliance with a stiffness and/or flatness specification, a concrete top structure with steel sub-frame is utilized. This combination of materials results in more reliable, repeatable performance characteristics at a cost competitive with other designs. Our bases are designed to provide appropriate structural support without amplification of vibrational energies that interfere with tool performance. Fulcrum Technologies, Incorporated also provides custom engineered seismic restraint systems and calculation submittals specific to the tool/base/facility combination. Fulcrum Technologies, Incorporated is qualified by ASML to supply bases for the Twin Scan and 5500 series Step & Scan systems.

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