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Description
Lumarray is a lithography company with a state-of-the-art-patented technology, developed at MIT, that departs from a century old tradition of conventional optics. Our technology, Zone-Plate-Array Lithography (ZPAL), integrates recent advances in microfabrication, micromechanics and fast computing to produce a lithography tool that will handle the lithographic needs of the decades to come. LumArray, Incorporated was founded in 2002, originally as an LLC and later converted to a corporation. It is a spinoff from the NanoStructures laboratory at MIT, which was founded in 1977 by Prof. Henry I. Smith, the President of LumArray, Incorporated LumArray's expertise is derived from over 40 years of research on lithography at MIT, culminating in the invention and development of zone-plate-array lithography (ZPAL), the innovative technology upon which LumArray's product is based.