VLSI Standards Incorporated

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Description

Developing a positive partnership and collaboration with our customers is our approach to the science and business of making standards. Our scientists routinely work directly with customers to provide calibration solutions. Additionally, we provide a full range of support including a recleaning / recertification service, and a commitment to provide advice for product application and use. Even before you purchase a product, our worldwide sales representatives will work with you to determine exactly what types of products or services best meet your calibration or measurement needs.

ACCURATE, TRACEABLE STANDARDS. VLSI has over 20 years of experience in supplying traceable Calibration Standards to industries where measurement accuracy and instrument monitoring are required. VLSI Standards designs and manufactures an extensive array of products for the semiconductor, data storage, flat panel display, and photovoltaic industries. The majority of our products are traceable, and accredited to the ISO-17025 metrology laboratory standard, allowing customers to meet national and international quality standards such as ISO 9000, TS16949, and the APLAC MRA.

VLSI Standards designs and manufactures an extensive array of calibration products and services to assist you with your calibration efforts. Our calibration products and services typically come in the form of standards and references. The primary difference between a calibration standard and a calibration reference is that calibration standards have direct traceability to a higher authority; whereas calibration references do not - often because no official calibration standard exists.

VLSI Standards, Inc. was founded in 1984 in Mountain View, California for the purpose of developing measurement standards and associated services for the semiconductor and related industries. VLSI Standards' first products were a traceable Step Height Standard, and a line of Contamination Standards. Today, VLSI Standards provides dozens of standards, products, and services to address every aspect of instrument calibration in the semiconductor and other industries requiring accurate metrology.

The ALSTS dimensional product consists of 5 pitch clusters of varying dimension patterned in a layer of silicon dioxide and coated with Chromium for optimum contrast. The center cluster is certified and traceable, while the remaining clusters are for daily use monitors to extend the life of the microscope calibration standard. Each pitch cluster contains three distinct grid patterns spaced 100 µm apart. Each grid pattern measures approximately 270 µm x 270 µm and consists of an array of alternating bars and spaces with pitch in both X and Y directions.

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